The species dependence of inert gas ion incorporation in the ion-induced deposition of tungsten

Journal of Applied Physics

Volumn 86, Issue 5, 1999, Pages 2889-2895

  McLaren, M G ^a,b   Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005290304     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371137     Document Type: Article

References (23)

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