SCOPUS 정보 검색 플랫폼

Volumn 252, Issue 16, 2006, Pages 5900-5906

Integrated description for random adsorption and 2D-island growth kinetics in thin film growth: Autocatalytic-reaction model and kinetic Monte Carlo simulation

(3) Togashi, Hideaki a Enta, Yoshiharu b Suemitsu, Maki a

a TOHOKU UNIVERSITY (Japan)

b HIROSAKI UNIVERSITY (Japan)

Author keywords

Autocatalytic reaction; Coalescence; Island growth; Kinetic Monte Carlo simulation; Nucleation; Si oxidation; Thin film growth

Indexed keywords

ADSORPTION; CATALYSIS; COALESCENCE; FILM GROWTH; MONTE CARLO METHODS; NUCLEATION; OXIDATION; REACTION KINETICS;

AUTOCATALYTIC REACTION; ISLAND GROWTH; KINETIC MONTE CARLO SIMULATION; SI OXIDATION; THIN FILM GROWTH;

THIN FILMS;

EID: 33746789400 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2005.08.010 Document Type: Article

Times cited : (3)

References (15)

1
- 0000147268
- Suemitsu M., Enta Y., Miyanishi Y., and Miyamoto N. Phys. Rev. Lett. 82 (1999) 2334
- (1999) Phys. Rev. Lett. , vol.82 , pp. 2334
- Suemitsu, M.¹ Enta, Y.² Miyanishi, Y.³ Miyamoto, N.⁴

2
- 0037850497
- Suemitsu M., Enta Y., and Miyanishi Y. Appl. Phys. Lett. 77 (2000) 3179
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3179
- Suemitsu, M.¹ Enta, Y.² Miyanishi, Y.³

3
- 0037457150
- Suemitsu M., Togashi H., and Abe T. Thin Solid Films 428 (2003) 83
- (2003) Thin Solid Films , vol.428 , pp. 83
- Suemitsu, M.¹ Togashi, H.² Abe, T.³

4
- 3342948476
- Watanabe H., Kato K., Uda T., Fujita K., and Ichikawa M. Phys. Rev. Lett. 80 (1998) 345
- (1998) Phys. Rev. Lett. , vol.80 , pp. 345
- Watanabe, H.¹ Kato, K.² Uda, T.³ Fujita, K.⁴ Ichikawa, M.⁵

5
- 37549016644
- Seiple J.V., and Pelz J.P. J. Vac. Sci. Technol. A 13 (1995) 772
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 772
- Seiple, J.V.¹ Pelz, J.P.²

6
- 0001596062
- Wurm K., Kliese R., Hong Y., Röttger B., Wei Y., Neddermeyer H., and Tsong I.S.T. Phys. Rev. B 50 (1994) 1567
- (1994) Phys. Rev. B , vol.50 , pp. 1567
- Wurm, K.¹ Kliese, R.² Hong, Y.³ Röttger, B.⁴ Wei, Y.⁵ Neddermeyer, H.⁶ Tsong, I.S.T.⁷

7
- 0035277743
- Takakuwa Y., and Ishida F. J. Electron. Spectrosc. Relat. Phenom. 114-116 (2001) 401
- (2001) J. Electron. Spectrosc. Relat. Phenom. , vol.114-116 , pp. 401
- Takakuwa, Y.¹ Ishida, F.²

8
- 0037042021
- Takakuwa Y., Ishida F., and Kawawa T. Appl. Surf. Sci. 190 (2002) 20
- (2002) Appl. Surf. Sci. , vol.190 , pp. 20
- Takakuwa, Y.¹ Ishida, F.² Kawawa, T.³

9
- 0037732916
- Yoshigoe A., Moritani K., and Teraoka Y. Appl. Surf. Sci. 216 (2003) 388
- (2003) Appl. Surf. Sci. , vol.216 , pp. 388
- Yoshigoe, A.¹ Moritani, K.² Teraoka, Y.³

10
- 0042364957
- Yoshigoe A., Moritani K., and Teraoka Y. Jpn. J. Appl. Phys. 42 (2003) 3976
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 3976
- Yoshigoe, A.¹ Moritani, K.² Teraoka, Y.³

11
- 0141763610
- Yoshitoe A., Moritani K., and Teraoka Y. Jpn. J. Appl. Phys. 42 (2003) 4676
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 4676
- Yoshitoe, A.¹ Moritani, K.² Teraoka, Y.³

12
- 0003168363
- Ebner C., Seiple J.V., and Pelz J.P. Phys. Rev. B 52 (1995) 16651
- (1995) Phys. Rev. B , vol.52 , pp. 16651
- Ebner, C.¹ Seiple, J.V.² Pelz, J.P.³

13
- 0015326437
- Gilmer G.H., and Bennema P. J. Appl. Phys. 43 (1972) 1347
- (1972) J. Appl. Phys. , vol.43 , pp. 1347
- Gilmer, G.H.¹ Bennema, P.²

14
- 0001504948
- Mukesh D., Morton W., Kenney C.N., and Cutlip M.B. Surf. Sci. 138 (1984) 237
- (1984) Surf. Sci. , vol.138 , pp. 237
- Mukesh, D.¹ Morton, W.² Kenney, C.N.³ Cutlip, M.B.⁴

15
- 0015003630
- Vincent R. Proc. Roy. Soc. London, Ser. A 321 (1971) 53
- (1971) Proc. Roy. Soc. London, Ser. A , vol.321 , pp. 53
- Vincent, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.