Real time observation of initial thermal oxidation using O 2 gas on Si(0 0 1) surface by means of synchrotron radiation Si-2p photoemission spectroscopy

Applied Surface Science

Volumn 216, Issue 1-4 SPEC., 2003, Pages 388-394

  Yoshigoe, Akitaka ^a   Moritani, Kousuke ^a,b   Teraoka, Yuden ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

O 2 gas; Passive oxidation; Real time observation; Si oxidation states; Si(0 0 1) surface; Synchrotron radiation photoemission spectroscopy

Indexed keywords

DIFFUSION; OXIDATION; OXYGEN; PHOTOEMISSION; SILICON; SPECTROSCOPIC ANALYSIS; SYNCHROTRON RADIATION;

THERMAL OXIDATION;

SURFACE STRUCTURE;

EID: 0037732916     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00451-3     Document Type: Conference Paper

References (34)

1. Engel T. Surf. Sci. Rep. 18:1993;91.
2. Watanabe H., Kato K., Uda T., Fujita K., Ichikawa M.M., Kawamura T., Terakura K. Phys. Rev. Lett. 80:1998;345.
3. Suemitsu M., Enta Y., Miyanishi Y. Phys. Rev. Lett. 82:1999;2334;
4. Suemitsu M., Enta Y., Miyanishi Y. Appl. Phys. Lett. 77:2000;3179.
5. Enta Y., Takegawa Y., Suemitsu M., Miyamoto N. Appl. Surf. Sci. 100-101:1996;449.
6. Walkap R.E., Raider S.I. Appl. Phys. Lett. 53:1988;888.
7. Takakuwa Y., Yamaguchi T., Hori T., Horie T., Enta Y., Sakamoto H., Kato H., Miyamoato N. J. Electron Spectrosc. Relat. Phenom. 88-91:1998;747.
8. Horie T., Takakuwa Y., Miyamoto N. Jpn. J. Appl. Phys. 33:1994;4684.
9. Borman V.D., Gusev E.P., Lebedinski Yu., Troyan V.I. Phys. Rev. Lett. 67:1991;2387;
10. Borman V.D., Gusev E.P., Lebedinski Yu., Troyan V.I. Phys. Rev. B49:1994;5415.
11. Takakuwa Y., Ishida F. J. Electron Spectrosc. Relat. Phenom. 114-116:2001;401.
12. Seiple J.V., Pelz J.P. J. Vac. Sci. Technol. A13:1995;772;
13. Seiple J.V., Pelz J.P. Phys. Rev. B53:1996;15432.
14. Feltz A., Memmert U., Behm R.J. Surf. Sci. 314:1994;34.
15. Udagawa M., Miwa M., Sumita I. Jpn. J. Appl. Phys. 33:1994;375.
16. Teraoka Y., Yoshigoe A. Jpn. J. Appl. Phys. 38(1):1999;642;
17. Teraoka Y., Yoshigoe A. Appl. Surf. Sci. 169-170:2001;738.
18. Yokoya A., Sekiguchi T., Saitoh Y., Okane T., Nakatani T., Shimada T., Kobayashi H., Takao M., Teraoka Y., Hayashi Y., Sasaki S., Miyahara Y., Harami T., Sasaki T.A. J. Synchrotron Rad. 5:1998;10.
19. Nakatani T., Saitoh Y., Teraoka Y., Okane T., Yokoya A. J. Synchrotron Rad. 5:1998;536.
20. Saitoh Y., Nakatani T., Matsushita T., Agui A., Yoshigoe A., Teraoka Y., Yokoya A. Nucl. Instrum. Methods Phys. Res. A474:2001;253.
21. Ishizaka A., Shiraki Y. J. Electrochem. Soc. 133:1986;666.
22. Ferguson B.A., Reeves C.T., Mullins C.B. J. Chem. Phys. 110:1999;11574.
23. Himpsel F.J., McFeely F.R., Taleb-Ibrahimi A., Yarmoff J.A., Hollinger G. Phys. Rev. B38:1988;6084.
24. Teraoka Y., Yoshigoe A. Jpn. J. Appl. Phys. 41:2002;4253;
25. Teraoka Y., Yoshigoe A. Surf. Sci. 507-510:2002;797.
26. Yeom H.W., Uhrberg R. Jpn. J. Appl. Phys. 39:2000;4460;
27. Yeom H.W., Uhrberg R. Phys. Rev. B59:1999;R10413.
28. Pi T.-W., Cheng C.-P., Hong I.-H. Surf. Sci. 418:1998;113;
29. Pi T.-W., Hong I.-H., Cheng C.-P., Wertheim G.K. J. Electron Spectrosc. Relat. Phenom. 107:2000;163.
30. Uhrberg R.I.G., Landemark E., Chao Y.-C. J. Electron Spectrosc. Relat. Phenom. 75:1995;197;
31. Uhrberg R.I.G., Landemark E., Chao Y.-C. Phys. Rev. Lett. 69:1992;1588.
32. Oh J.H., Nakamura K., Ono K., Oshima M., Hirashita N., Niwa M., Toriumi A., Kakizaki A. J. Electron Spectrosc. Relat. Phenom. 114-116:2001;395.
33. Kato K., Uda T., Terakura K. Phys. Rev. Lett. 80:1998;2000;
34. Kato K., Uda T., Terakura K. Phys. Rev. B62:2000;15978.