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Volumn 23, Issue 6, 2006, Pages 1623-1626
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Variability on raman shift to stress coefficient of porous silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPILLARITY;
ELASTIC MODULI;
POROSITY;
RESIDUAL STRESSES;
CAPILLARY FORCE;
DRYING PROCESS;
LIQUID EVAPORATION;
MICRO RAMAN SPECTROSCOPY;
MICROPORE STRUCTURE;
NONLINEAR RELATIONS;
POROUS SILICON FILMS;
RAMAN SHIFT;
SILICON SAMPLES;
STRESS COEFFICIENTS;
POROUS SILICON;
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EID: 33746671273
PISSN: 0256307X
EISSN: 17413540
Source Type: Journal
DOI: 10.1088/0256-307X/23/6/074 Document Type: Article |
Times cited : (10)
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References (14)
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