An application of Raman spectroscopy on the measurement of residual stress in porous silicon

Optics and Lasers in Engineering

Volumn 43, Issue 8, 2005, Pages 847-855

  Kang, Yilan ^a   Qiu, Yu ^a   Lei, Zhenkun ^a   Hu, Ming ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Crack; Porosity; Porous silicon; Raman spectroscopy; Residual stress

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACKS; ETCHING; POROSITY; POROUS SILICON; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; SUBSTRATES; THIN FILMS;

CHEMICAL ETCHING; ELECTROCHEMICAL ETCHING TECHNIQUES; MICRO-RAMAN SPECTROSCOPY; RAMAN SHIFT;

RAMAN SPECTROSCOPY;

EID: 16344364720     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2004.09.005     Document Type: Conference Paper

References (11)

1. S. Manotas, F. Agullo-Rueda, J.D. Moreno, F. Ben-Hander, and J.M. Martinez-Duart Lattice-mismatch induced-stress in porous silicon films Thin Solid Films 401 2001 306 309
2. G. Kaltsas, A.G. Nassiopoulou, M. Siakavellas, and E. Anastassakis Stress effect on suspended polycrystalline silicon membranes fabricated by micromachining of porous silicon Sensors Actuators A68 1998 429 434
3. Jin Qian, Cheng Liu, Dacheng Zhang, and Yapu Zhao Residual stresses in micro-electro-mechanical systems J Mech Strength 23 4 2001 393 401 [In Chinese]
4. Min Ya, Yongmin Xing, Fulong Dai, Ke Lu, and Jian Lu Study of residual stress in surface nanostructured ALSI 316L strainless steel using two mechanical methods Surf Coat Technol 168 2003 148 155
5. Wang Qimin, Shan Baoxiang, Lian Dongxia, and Zhang Peiqiang Measurement of essential mechanical characteristics for MEMS and its components J Exp Mech 12 4 1997 487 499 [In Chinese]
6. E. Anastassakis, A. Canterero, and M. Cardona Piezo-Raman measurements and anharmonic parameters in silicon and diamond Phys Rev B 41 11 1990 7529 7535
7. Ingrid De Wolf Topical review Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits Semicond Sci Technol 11 1996 139 154
8. Ingrid De Wolf Stress measurements in Si microelectronics devices using Raman spectroscopy J Raman Spectrosc 30 1999 877 883
9. Ingrid De Wolf, Chen Jian, and W. Merlijn van Spengen The investigation of microsystems using Raman spectroscopy Opti Lasers Eng 36 2 2001 213 223
10. Zhenkun Lei, Yilan Kang, Ming Hu, Yu Qiu, Xu Han, and Niu Hongpan An experimental study of residual stress measurements in porous silicon using micro-Raman spectroscopy Chinese Phy Lett 21 2 2004 403 405
11. Qian Jin. Design, fabrication and mechanical analysis of a novel microflowmeter. Master Dissertation of Research Institute of Mechanics, Chinese Academy of Sciences, 2003, 7 [In Chinese].