Experimental study on mechanical properties of micro-structured porous silicon film

Transactions of Tianjin University

Volumn 11, Issue 2, 2005, Pages 85-88

  Lei, Zhenkun ^a,b   Kang, Yilan ^a   Cen, Hao ^a   Qiu, Yu ^a   Hu, Ming ^a  

^a TIANJIN UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Mechanical properties; Micro Raman spectroscopy; Porous silicon; X ray diffraction

Indexed keywords

ELASTIC MODULI; ETCHING; MECHANICAL PROPERTIES; MICROSTRUCTURE; POROSITY; POROUS MATERIALS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; X RAY DIFFRACTION;

CHEMICAL ETCHING; MICROPORE STRUCTURE; MICRORAMAN SPECTROSCOPY; MICROSTRUCTURED POROUS SILICON FILM;

POROUS SILICON;

EID: 19644391389     PISSN: 10064982     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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