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Volumn 89, Issue 2, 2006, Pages
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In situ pendeoepitaxy of GaN using heteroepitaxial AlGaN/GaN cracks
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
CHEMICAL VAPOR DEPOSITION;
CRACKS;
EPITAXIAL GROWTH;
ETCHING;
NUCLEATION;
PATTERN RECOGNITION;
SILICON;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ALGAN/GAN;
PENDEOEPITAXY;
SITU THERMAL ETCHING;
GALLIUM NITRIDE;
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EID: 33746045281
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2219093 Document Type: Article |
Times cited : (4)
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References (13)
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