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Journal of Non-Crystalline Solids

Volumn 352, Issue 28-29, 2006, Pages 3134-3139

XPS study of pulsed Nd:YAG laser oxidized Si

(4) Aygun, G a,b Atanassova, E c Kostov, K d Turan, R a

a MIDDLE EAST TECHNICAL UNIVERSITY (Turkey)

b IZMIR INSTITUTE OF TECHNOLOGY (Turkey)

c INSTITUTE OF SOLID STATE PHYSICS (Bulgaria)

d INSTITUTE OF GENERAL AND INORGANIC CHEMISTRY (Bulgaria)

Author keywords

Laser matter interactions; Lasers; Silicon; XPS

Indexed keywords

ANNEALING; MICROSTRUCTURE; NEODYMIUM; OXIDATION; SILICON; STOICHIOMETRY; SUBSTRATES; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

DECOMPOSITION TECHNIQUE; FILM STRUCTURE; LASER-MATTER INTERACTIONS; SUBOXIDES;

NEODYMIUM LASERS;

EID: 33745877188 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2006.03.063 Document Type: Article

Times cited : (18)

References (24)

1
- 33745890503
- Intern. Techn. Roadmap for Semiconduct., SIA, San Jose, CA, Available from: .

2
- 0000869609
- Nalwa H.S. (Ed), Academic Press, San Diego, CA, USA
- Atanassova E., and Dimitrova T. In: Nalwa H.S. (Ed). Handbook of Surface and Interface of Materials vol. 4 (2001), Academic Press, San Diego, CA, USA 439
- (2001) Handbook of Surface and Interface of Materials , vol.4 , pp. 439
- Atanassova, E.¹ Dimitrova, T.²

3
- 0035872897
- (and references therein)
- Wilk G.D., Wallace R.M., and Anthony J.M. J. Appl. Phys. 89 (2001) 5243 (and references therein)
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

4
- 0003576507
- Prentice Hall, Englewood Cliffs, NJ
- Plummer J.D., Deal M., and Griffin P.B. Silicon VLSI Technology (2000), Prentice Hall, Englewood Cliffs, NJ
- (2000) Silicon VLSI Technology
- Plummer, J.D.¹ Deal, M.² Griffin, P.B.³

5
- 0006795577
- Campbell P.M., and Snow E.S. Mater. Sci. Eng. B 51 (1998) 173
- (1998) Mater. Sci. Eng. B , vol.51 , pp. 173
- Campbell, P.M.¹ Snow, E.S.²

6
- 0038183837
- Blasco X., Nafria M., and Aymerich X. Surf. Sci. 532-535 (2003) 732
- (2003) Surf. Sci. , vol.532-535 , pp. 732
- Blasco, X.¹ Nafria, M.² Aymerich, X.³

7
- 2942659876
- Aygun G., Atanassova E., Alacakir A., Ozyuzer L., and Turan R. J. Phys. D: Appl. Phys. 37 (2004) 1569
- (2004) J. Phys. D: Appl. Phys. , vol.37 , pp. 1569
- Aygun, G.¹ Atanassova, E.² Alacakir, A.³ Ozyuzer, L.⁴ Turan, R.⁵

8
- 0035356844
- Zankovych S., Hoffmann T., Seekamp J., Bruch J.V., and Sotomayor C.M. Nanotechnology 12 (2001) 91
- (2001) Nanotechnology , vol.12 , pp. 91
- Zankovych, S.¹ Hoffmann, T.² Seekamp, J.³ Bruch, J.V.⁴ Sotomayor, C.M.⁵

9
- 0003884067
- Springer, Berlin Heidelberg Chapter 2
- Boyd I.W. Laser Processing of Thin Films and Microstructures (1987), Springer, Berlin Heidelberg Chapter 2
- (1987) Laser Processing of Thin Films and Microstructures
- Boyd, I.W.¹

10
- 0037185190
- Lavisse L., Grevey D., Langlade C., and Vannes B. Appl. Surf. Sci. 186 (2002) 150
- (2002) Appl. Surf. Sci. , vol.186 , pp. 150
- Lavisse, L.¹ Grevey, D.² Langlade, C.³ Vannes, B.⁴

11
- 0036420002
- Perez del Pino A., Serra P., and Morenza J.L. Appl. Surf. Sci. 197&198 (2002) 887
- (2002) Appl. Surf. Sci. , vol.197-198 , pp. 887
- Perez del Pino, A.¹ Serra, P.² Morenza, J.L.³

12
- 0037408672
- Dong Q., Hu J., Lian J., Guo Z., Chen J., and Chen B. Scripta Materialia 48 (2003) 1373
- (2003) Scripta Materialia , vol.48 , pp. 1373
- Dong, Q.¹ Hu, J.² Lian, J.³ Guo, Z.⁴ Chen, J.⁵ Chen, B.⁶

13
- 9944243121
- Aygun G., Atanassova E., Turan R., and Babeva Tz. Mat. Chem. Phys. 89 (2005) 316
- (2005) Mat. Chem. Phys. , vol.89 , pp. 316
- Aygun, G.¹ Atanassova, E.² Turan, R.³ Babeva, Tz.⁴

14
- 0016972585
- Johannessen J.S., Spicer W.E., and Strausser Y.E. J. Appl. Phys. 47 (1976) 3028
- (1976) J. Appl. Phys. , vol.47 , pp. 3028
- Johannessen, J.S.¹ Spicer, W.E.² Strausser, Y.E.³

15
- 0038280503
- Hecht M.H., Grunthaner F.J., Pianetta P., Johansson L.I., and Lindau I. J. Vac. Sci. Technol. A 2 (1984) 584
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 584
- Hecht, M.H.¹ Grunthaner, F.J.² Pianetta, P.³ Johansson, L.I.⁴ Lindau, I.⁵

16
- 0021406265
- Vengurlekar A.S., Chandorkar A.N., and Ramanathan K.V. Thin Solid Films 114 (1984) 285
- (1984) Thin Solid Films , vol.114 , pp. 285
- Vengurlekar, A.S.¹ Chandorkar, A.N.² Ramanathan, K.V.³

17
- 0030394268
- Atanassova E., and Paskaleva A. Appl. Surf. Sci. 103 (1996) 359
- (1996) Appl. Surf. Sci. , vol.103 , pp. 359
- Atanassova, E.¹ Paskaleva, A.²

18
- 0019242588
- Grunthaner F.J., Lewis B.F., Zamini N., Maserdjian J., and Madhukar A. IEEE Trans. Nucl. Sci. 27 (1980) 1640
- (1980) IEEE Trans. Nucl. Sci. , vol.27 , pp. 1640
- Grunthaner, F.J.¹ Lewis, B.F.² Zamini, N.³ Maserdjian, J.⁴ Madhukar, A.⁵

19
- 3343006353
- Himpsel F.T., Mc Feely F.R., Taleb-Ibrahimi A., Yarmoff J.A., and Hollinger G. Phys. Rev. B 38 (1988) 6084
- (1988) Phys. Rev. B , vol.38 , pp. 6084
- Himpsel, F.T.¹ Mc Feely, F.R.² Taleb-Ibrahimi, A.³ Yarmoff, J.A.⁴ Hollinger, G.⁵

20
- 0031381128
- Atanassova E., and Paskaleva A. Appl. Surf. Sci. 120 (1997) 306
- (1997) Appl. Surf. Sci. , vol.120 , pp. 306
- Atanassova, E.¹ Paskaleva, A.²

21
- 0040514381
- Garner C.M., Lindau I., Su C.Y., Pianetta P., and Spicer W.E. Phys. Rev. B 19 (1979) 3944
- (1979) Phys. Rev. B , vol.19 , pp. 3944
- Garner, C.M.¹ Lindau, I.² Su, C.Y.³ Pianetta, P.⁴ Spicer, W.E.⁵

22
- 0019035450
- Adachi T., and Helmus C.R. J. Electrochem. Soc. 127 (1980) 1617
- (1980) J. Electrochem. Soc. , vol.127 , pp. 1617
- Adachi, T.¹ Helmus, C.R.²

23
- 0020113917
- Barr T.L. Appl. Surf. Sci. 15 (1983) 1
- (1983) Appl. Surf. Sci. , vol.15 , pp. 1
- Barr, T.L.¹

24
- 0020834269
- Sauz J.M., and Hofmann S. Surf. Interf. Anal. 5 (1983) 210
- (1983) Surf. Interf. Anal. , vol.5 , pp. 210
- Sauz, J.M.¹ Hofmann, S.²

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