Oxidation of Si surface by a pulsed Nd: YAG laser

Journal of Physics D: Applied Physics

Volumn 37, Issue 11, 2004, Pages 1569-1575

  Aygun, G ^a   Atanassova, E ^b   Alacakir, A ^c   Ozyuzer, L ^d   Turan, R ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^c Ankara Nuclear Research and Training Center   (Turkey)

^d IZMIR INSTITUTE OF TECHNOLOGY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; LASER BEAMS; MICROELECTRONICS; OPTIMIZATION; OXIDATION; PERMITTIVITY; SILICA; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

LASER ASSISTED OXIDATION; LASER BEAM ENERGY DENSITY; SPATIAL RESOLUTION; SURFACE MELTING;

NEODYMIUM LASERS;

EID: 2942659876     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/11/011     Document Type: Article

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