Micromachined thick film piezoelectric ultrasonic transducer array

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 485-490

  Wang, Zhihong ^a,b   Zhu, Weiguang ^a   Miao, Jianmin ^b   Zhu, Hong ^b   Chao, Chen ^a   Tan, Ooi Kiang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Micromachining; Piezoelectric thick film; Ultrasonic transducer array

Indexed keywords

MICROMACHINING; PIEZOELECTRIC DEVICES; TRANSDUCERS;

PIEZOELECTRIC THICK FILM; ULTRASONIC TRANSDUCER ARRAY;

THICK FILM DEVICES;

EID: 33745863104     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.054     Document Type: Article

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