Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 322-328

  Beeby, S P ^a   Ross, J N ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SCREEN PRINTING; SENSORS; SILICON; THICK FILM DEVICES;

SILICON ACCELEROMETERS;

MICROMACHINING;

EID: 0034274214     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/304     Document Type: Article

References (13)

1. Koch M, Harris N, Maas R, Evans A G R, White N M and Brunnschweiler A 1997 Meas. Sci. Technol. 8 49-57
2. Maas R, Koch M, Harris N R, White N M and Evans A G R 1991 Mater. Lett. 31 109-12
3. Harris N, Koch M, Beeby S, White N M and Evans A G R 1998 Proc. 9th Micromechanics Europe Workshop (MME '98) (Ulvik, Norway 3-5 June) pp 78-81
4. Beeby S, Blackburn A and White N M 1999 J. Micromech. Microeng. 9 218-29
5. Beeby S, Ross R and White N M 1999 Electron. Lett. 35 2060-2
6. Gardner J W 1995 IEE Rev. September 185-8
7. Greenwood J C 1988 J. Phys. E: Sci. Instrum. 21 1114-28
8. Aoki K, Fukuda Y and Nishimura A 1993 Japan. J. Appl. Phys. 32 4147-9
9. Tvarozek V, Novotny I, Cerven I, Kovac J and Lacko T 1992 Sensors Actuators A 30 123-7
10. Hendricks W C, Desu S B, Si J and Peng C H 1993 Proc. Mater. Res. Soc. Symp. vol 310, pp 241-7
11. ANSYS Users Manual Vol. I: Procedures ch 8, pp 13-15
12. ANSYS Users Manual Vol. IV: Theory ch 11, pp 11-16
13. de Reus R, Gullov J O and Scheeper P R 1999 J. Micromech. Microeng. 9 123-6