PZT coated membrane structures for micromachined ultrasonic transducers

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2002, Pages 483-486

  Baborowski, J ^a   Muralt, P ^a   Ledermann, N ^a   Petitgrand, S ^b   Bosseboeuf, A ^b   Setter, N ^a   Gaucher, Ph ^c  

^a EPFL   (Switzerland)

^b CNRS   (France)

^c Thales Central Research Laboratory   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMAGING; ARRAYS; CANTILEVER BEAMS; MICROMACHINING; SOL-GELS; STRESS ANALYSIS; THIN FILMS;

MEMBRANE STRUCTURES;

ULTRASONIC TRANSDUCERS;

EID: 0038749500     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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