Integral characteristics of spectra of ions important for EUV lithography

Journal of Physics D: Applied Physics

Volumn 39, Issue 14, 2006, Pages 2973-2978

  Karazija, R ^a   Kucas S ^a   Momkauskaite, A ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; INDIUM; IODINE; IONIZATION; LITHOGRAPHY; PHASE TRANSITIONS; QUENCHING; SPECTRUM ANALYSIS; TELLURIUM; TIN; XENON;

ATOMIC NUMBER; AVERAGE ENERGY; PSEUDORELATIVISTIC APPROXIMATION; TOTAL LINE STRENGTH; TRANSITION ARRAY; VARIANCE; WAVELENGTHS;

PARTICULATE EMISSIONS;

EID: 33745727704     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/14/016     Document Type: Article

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