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Volumn 27, Issue 7, 2006, Pages 585-587

Role of anode hole injection and valence band hole tunneling on interface trap generation during hot carrier injection stress

Author keywords

Anode hole injection (AHI); Charge pumping (CP); Hot carrier injection (HCI); Interface traps (NIT); Reaction diffusion (R D) model; Valence band hole tunneling (VBHT)

Indexed keywords

ANODES; DENSITY (SPECIFIC GRAVITY); ELECTRON TRAPS; GATES (TRANSISTOR); HOT CARRIERS; INTERFACES (MATERIALS); SILICA; STRESSES;

EID: 33745665383     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.876310     Document Type: Article
Times cited : (22)

References (23)
  • 1
    • 84945713471 scopus 로고
    • "Hot electron induced MOSFET degradation - Model, monitor and improvement"
    • Feb
    • C. Hu, S. C. Tam, F. C. Hsu, P. K. Ko, T. Y. Chan, and K. W. Terrill, "Hot electron induced MOSFET degradation - Model, monitor and improvement," IEEE Trans. Electron Devices, vol. ED-32, no. 2, pp. 375-385, Feb. 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , Issue.2 , pp. 375-385
    • Hu, C.1    Tam, S.C.2    Hsu, F.C.3    Ko, P.K.4    Chan, T.Y.5    Terrill, K.W.6
  • 2
    • 0024124856 scopus 로고
    • "Consistent model for the hot carrier degradation in n-channel and p-channel MOSFETs"
    • Dec
    • P. Heremans, R. Bellens, G. Groeseneken, and H. E. Maes, "Consistent model for the hot carrier degradation in n-channel and p-channel MOSFETs," IEEE Trans. Electron Devices, vol. 35, no. 12, pp. 2194-2194, Dec. 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , Issue.12 , pp. 2194-2194
    • Heremans, P.1    Bellens, R.2    Groeseneken, G.3    Maes, H.E.4
  • 3
    • 0029373408 scopus 로고
    • "Hot carrier degradation in submicrometer MOSFETs: From uniform injection towards the real operating conditions"
    • Sep
    • G. Groeseneken, R. Bellens, G. Van den bosch, and H. E. Maes, "Hot carrier degradation in submicrometer MOSFETs: From uniform injection towards the real operating conditions," Semicond. Sci. Technol., vol. 10, no. 9, p. 1208, Sep. 1995.
    • (1995) Semicond. Sci. Technol. , vol.10 , Issue.9 , pp. 1208
    • Groeseneken, G.1    Bellens, R.2    Van den bosch, G.3    Maes, H.E.4
  • 4
    • 0033889732 scopus 로고    scopus 로고
    • "Device scaling effects on hot-carrier induced interface and oxide trapped charge distributions in MOSFETs"
    • Apr
    • S. Mahapatra, C. D. Parikh, V. R. Rao, C. R. Viswanathan, and J. Vasi, "Device scaling effects on hot-carrier induced interface and oxide trapped charge distributions in MOSFETs," IEEE Trans. Electron Devices, vol. 47, no. 4, pp. 789-796, Apr. 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , Issue.4 , pp. 789-796
    • Mahapatra, S.1    Parikh, C.D.2    Rao, V.R.3    Viswanathan, C.R.4    Vasi, J.5
  • 5
    • 0033169518 scopus 로고    scopus 로고
    • "A study of interface trap generation by Fowler - Nordheim and substrate-hot-carrier stresses for 4-nm thick gate oxides"
    • Aug
    • J.-H. Shiue, J. Y. Lee, and T.-S. Chao, "A study of interface trap generation by Fowler - Nordheim and substrate-hot-carrier stresses for 4-nm thick gate oxides," IEEE Trans. Electron Devices, vol. 46, no. 8, pp. 1705-1710, Aug. 1999.
    • (1999) IEEE Trans. Electron Devices , vol.46 , Issue.8 , pp. 1705-1710
    • Shiue, J.-H.1    Lee, J.Y.2    Chao, T.-S.3
  • 6
    • 0036475593 scopus 로고    scopus 로고
    • "On interface and oxide degradation in VLSI MOSFETs - Part II: Fowler - Nordheim stress regime"
    • Feb
    • D. Esseni, J. D. Bude, and L. Selmi, "On interface and oxide degradation in VLSI MOSFETs - Part II: Fowler - Nordheim stress regime," IEEE Trans. Electron Devices, vol. 49, no. 2, pp. 254-263, Feb. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.2 , pp. 254-263
    • Esseni, D.1    Bude, J.D.2    Selmi, L.3
  • 8
    • 4444341905 scopus 로고    scopus 로고
    • "Investigation and modeling of interface and bulk trap generation during negative bias temperature instability in p-MOSFETs"
    • Sep
    • S. Mahapatra, P. B. Kumar, and M. A. Alam, "Investigation and modeling of interface and bulk trap generation during negative bias temperature instability in p-MOSFETs," IEEE Trans. Electron Devices, vol. 51, no. 9, pp. 1371-1379, Sep. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.9 , pp. 1371-1379
    • Mahapatra, S.1    Kumar, P.B.2    Alam, M.A.3
  • 10
    • 0017493207 scopus 로고
    • "Negative bias stress of MOS devices at high electric fields and degradation of MOS devices"
    • May
    • K. O. Jeppson and C. M. Svensson, "Negative bias stress of MOS devices at high electric fields and degradation of MOS devices," J. Appl. Phys., vol. 48, no. 5, pp. 2004-2014, May 1977.
    • (1977) J. Appl. Phys. , vol.48 , Issue.5 , pp. 2004-2014
    • Jeppson, K.O.1    Svensson, C.M.2
  • 11
    • 0842266651 scopus 로고    scopus 로고
    • "A critical examination of the mechanics of dynamic NBTI for p-MOSFETs"
    • M. A. Alam, "A critical examination of the mechanics of dynamic NBTI for p-MOSFETs," in IEDM Tech. Dig., 2003, pp. 345-348.
    • (2003) IEDM Tech. Dig. , pp. 345-348
    • Alam, M.A.1
  • 13
    • 19044394081 scopus 로고    scopus 로고
    • "A geometrical unification of the theories of NBTI and HCI time exponents and its implications for ultra-scaled planar and surround gate MOSFETs"
    • H. Kufluoglu and M. A. Alam, "A geometrical unification of the theories of NBTI and HCI time exponents and its implications for ultra-scaled planar and surround gate MOSFETs," in IEDM Tech. Dig., 2004, pp. 113-116.
    • (2004) IEDM Tech. Dig. , pp. 113-116
    • Kufluoglu, H.1    Alam, M.A.2
  • 14
    • 0022028660 scopus 로고
    • "Hot electron and hole emission effects in short n-channel MOSFETs"
    • Mar
    • K. R. Hofmann, C. Werner, W. Weber, and G. Dorda, "Hot electron and hole emission effects in short n-channel MOSFETs," IEEE Trans. Electron Devices, vol. ED-32, no. 3, pp. 691-699, Mar. 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , Issue.3 , pp. 691-699
    • Hofmann, K.R.1    Werner, C.2    Weber, W.3    Dorda, G.4
  • 15
    • 0003164115 scopus 로고
    • "Two-carrier nature in interface trap generation in hole trapping and radiation damage"
    • Jul
    • S. K. Lai, "Two-carrier nature in interface trap generation in hole trapping and radiation damage," Appl. Phys. Lett., vol. 39, no. 1, p. 58, Jul. 1981.
    • (1981) Appl. Phys. Lett. , vol.39 , Issue.1 , pp. 58
    • Lai, S.K.1
  • 16
    • 0036475249 scopus 로고    scopus 로고
    • "On interface and oxide degradation in VLSI MOSFETs - Part I: Deuterium effect in CHE stress regime"
    • Feb
    • D. Esseni, J. D. Bude, and L. Selmi, "On interface and oxide degradation in VLSI MOSFETs - Part I: Deuterium effect in CHE stress regime," IEEE Trans. Electron Devices, vol. 49, no. 2, pp. 247-253, Feb. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.2 , pp. 247-253
    • Esseni, D.1    Bude, J.D.2    Selmi, L.3
  • 18
    • 33644630332 scopus 로고    scopus 로고
    • "On the generation and recovery of hot carrier induced interface traps: A critical examination of the 2D reaction diffusion model"
    • Mar. submitted for publication
    • D. Saha, D. Varghese, and S. Mahapatra, "On the generation and recovery of hot carrier induced interface traps: A critical examination of the 2D reaction diffusion model," IEEE Electron Device Lett., Mar. 2006. submitted for publication.
    • (2006) IEEE Electron Device Lett.
    • Saha, D.1    Varghese, D.2    Mahapatra, S.3
  • 19
    • 0033733540 scopus 로고    scopus 로고
    • "Field acceleration for oxide breakdown - Can an accurate anode hole injection model resolve the E versus 1/E controversy"
    • M. Alam, J. Bude, and A. Ghetti, "Field acceleration for oxide breakdown - Can an accurate anode hole injection model resolve the E versus 1/E controversy," in Proc. Int. Reliab. Phys. Symp., 2000, pp. 21-26.
    • (2000) Proc. Int. Reliab. Phys. Symp. , pp. 21-26
    • Alam, M.1    Bude, J.2    Ghetti, A.3
  • 20
    • 0035395857 scopus 로고    scopus 로고
    • "Modeling CMOS tunneling currents through ultrathin gate oxide due to conduction-and valence-band electron and hole tunneling"
    • Jul
    • W. C. Lee and C. Hu, "Modeling CMOS tunneling currents through ultrathin gate oxide due to conduction-and valence-band electron and hole tunneling," IEEE Trans. Electron Devices, vol. 48, no. 7, pp. 1366-1373, Jul. 2001.
    • (2001) IEEE Trans. Electron Devices , vol.48 , Issue.7 , pp. 1366-1373
    • Lee, W.C.1    Hu, C.2
  • 21
  • 22
    • 0242527648 scopus 로고    scopus 로고
    • ISE TCAD, Synopsis Inc., Mountainview, CA
    • User Manual, ISE TCAD, Synopsis Inc., Mountainview, CA, 2002.
    • (2002) User Manual
  • 23
    • 0034297544 scopus 로고    scopus 로고
    • "Monte Carlo simulation of CHISEL Flash memory cell"
    • Oct
    • J. D. Bude, M. R. Pinto, and R. K. Smith, "Monte Carlo simulation of CHISEL Flash memory cell," IEEE Trans. Electron Devices, vol. 47, no. 10, pp. 1873-1881, Oct. 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , Issue.10 , pp. 1873-1881
    • Bude, J.D.1    Pinto, M.R.2    Smith, R.K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.