Effect of top coat and resist thickness on line edge roughness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6153 I, Issue , 2006, Pages

  Singh, Lovejeet ^a   Matthew, Itty ^a   Pawloski, Adam ^a   Minvielle, Anna ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

LER; Resist Thickness; Substrate Interaction; Top Coat

Indexed keywords

IMMERSION LITHOGRAPHY; LINE EDGE ROUGHNESS (LER); RESIST THICKNESS; SUBSTRATE INTERACTION; TOP COAT;

CONTAMINATION; LEACHING; LITHOGRAPHY; SILICONE COATINGS; SURFACE ROUGHNESS; ULTRATHIN FILMS;

THICKNESS CONTROL;

EID: 33745613842     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655925     Document Type: Conference Paper

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