The effect of film thickness on the dissolution rate and hydrogen bonding behavior of photoresist polymer thin films

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5753, Issue I, 2005, Pages 319-328

  Singh, Lovejeet ^a   Ludovice, Peter J ^a   Henderson, Clifford L ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

Dissolution rate; Film thickness; Hydrogen bond; Novolac; Poly(hydroxystyrene); Polymer; Polynorbornene

Indexed keywords

DISSOLUTION RATES; FILM THICKNESS; NOVOLAC; POLY(HYDROXYSTYRENE); POLYNORBORNENE;

DISSOLUTION; HYDROGEN BONDS; MATHEMATICAL MODELS; PHOTORESISTS; POLYMERS; THICKNESS MEASUREMENT;

THIN FILMS;

EID: 24644451499     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600100     Document Type: Conference Paper

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