Direct fabrication of photonic crystal on glass substrate by nanoimprint lithography

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 45, Issue 4-7, 2006, Pages

  Ishihara, Kuniaki ^a   Fujita, Masayuki ^a   Matsubara, Ippei ^a   Asano, Takashi ^a   Noda, Susumu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Glass substrate; Nanoimprint lithography; Navler Stokes equation; Photonic crystal; Viscous fluid; Visible wave length

Indexed keywords

GLASS; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; SUBSTRATES; THERMAL EFFECTS; TWO DIMENSIONAL;

GLASS SUBSTRATE; NANOIMPRINT LITHOGRAPHY; NAVLER-STOKES EQUATION; PHOTONIC CRYSTAL; VISCOUS FLUID; VISIBLE WAVE-LENGTH;

CRYSTAL STRUCTURE;

EID: 33745152340     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.L210     Document Type: Article

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