Fabrication of micro optical elements and bio-chip patterns on glass surface by imprint lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5515, Issue , 2004, Pages 81-87

  Tsubouchi, Yasuhisa ^a   Yamaguchi, Takehiko ^a   Yao, Kazuyuki ^a   Kitagawa, Seiichiro ^a   Hirai, Yoshihiko ^b  

^a Nalux Co Ltd   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

Free form surface; Glass; Imprint lithography; Optical element; Well array

Indexed keywords

CERAMIC MATERIALS; DIAMOND CUTTING TOOLS; DNA; GLASS; LITHOGRAPHY; OPTICAL COMMUNICATION; REFRACTIVE INDEX; THERMAL EXPANSION; VLSI CIRCUITS;

FREE FORM SURFACE; IMPRINT LITHOGRAPHY; OPTICAL ELEMENT; WELL ARRAY;

MICROOPTICS;

EID: 13244287811     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.560144     Document Type: Conference Paper

References (3)

1. S. Chou, P. Krauss and P. Renstrom: "Nanoimprint lithography",J. Vac. Sci. Technol. B14, (1996) 4129 -4133.
2. V. Fischer, T. Matsuura and S. Hirota: Laser Focus World, 31, (1995) 167.
3. Y.Hirai, K.Kanakugi, T.Yamaguchi, K.Yao, S.Kitagawa and Y.Tanaka:,'Fine Pattern Fabrication on Glass Surface by Imprint Lithography', Microelectronic Engineering, 67-68, (2003) 237-244.