Flexural-plate-wave actuators based on PZT thin film

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 327-332

  Luginbuhl, Ph ^a   Collins, S D ^a   Racine, G A ^a   Gretillat, M A ^a   de Rooij, N F ^a   Brooks, K G ^a   Setter, N ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CERAMIC MATERIALS; PIEZOELECTRIC DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SOL-GELS; THIN FILMS;

FLEXURAL PLATE WAVE ACTUATORS; INTERDIGITATED TRANSDUCERS (IDT); MICROFABRICATED ACOUSTIC LAMB WAVE DEVICES;

ULTRASONIC TRANSDUCERS;

EID: 0030676707     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)