Chemical effects in chemical mechanical planarization of TaN: Investigation of surface reactions in a peroxide-based alkaline slurry using Fourier transform impedance spectroscopy

Materials Letters

Volumn 59, Issue 6, 2005, Pages 690-693

  Gorantla, V R K ^a   Emery, S B ^a   Pandija, S ^a   Babu, S V ^a   Roy, D ^a  

^a CLARKSON UNIVERSITY   (United States)

Author keywords

CMP; Electronic materials; Impedance spectroscopy; Surfaces; Tantalum; Tantalum nitride

Indexed keywords

COMPOSITE MATERIALS; DIFFUSION; ELECTRIC POTENTIAL; ELECTROCHEMISTRY; MICROPROCESSOR CHIPS; PEROXIDES; PH EFFECTS; SEMICONDUCTOR MATERIALS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; SURFACE ROUGHNESS; THIN FILMS;

CHEMICAL MECHANICAL PLANARIZATION (CMP); ELECTRONIC MATERIALS; IMPEDANCE SPECTROSCOPIES; TANTALUM NITRIDE;

TANTALUM COMPOUNDS;

EID: 12244313915     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2004.11.010     Document Type: Article

References (14)

1. Chemical-Mechanical Polishing S.V. Babu K.C. Cadien H. Yano Advances and Future Challenges 2001 Materials Research Society Warrendale
2. K.A. Assiongbon, S.B. Emery, C.M. Pettit, S.V. Babu, and D. Roy Mater. Chem. Phys. 86 2004 347
3. N.-H. Kim, J.-H. Lim, S.-Y. Kim, and E.-G. Chang Mater. Lett. 4601 2003 4604
4. http://www.clarkson.edu/~surop/.
5. J.E. Garland, C.M. Pettit, and D. Roy Electrochim. Acta 49 2004 2623
6. A. Jindal, S. Hegde, and S.V. Babu J. Electrochem. Soc. 150 2003 G314
7. C.M. Pettit, J.E. Garland, M.J. Walters, and D. Roy Electrochim. Acta 49 2004 3293
8. J.E. Garland, C.M. Pettit, M.J. Walters, and D. Roy Surf. Interface Anal. 31 2001 492 503
9. J.R. Hayes, D.-W. Kim, H. Meidia, and S. Mahajan Acta Mater. 51 2003 653
10. S. Dueñas, E. Castán, J. Barbolla, R.R. Kola, and P.A. Sullivan Solid-State Electron. 45 2001 1441
11. Y. Chen, J.L.G. Fierro, T. Tanaka, and I.E. Wachs J. Phys. Chem., B 107 2003 5243
12. L. Young Anodic Oxide Films 1961 Academic Press New York 70
13. C. Bartles, J.W. Schultze, U. Stimming, and M.A. Habib Electrochim. Acta 27 1982 129
14. J. Lu, J.E. Garland, C.M. Pettit, S.V. Babu, and D. Roy J. Electrochem. Soc. 151 2004 G717