Amino acids as complexing agents in chemical-mechanical planarization of copper

Chemistry of Materials

Volumn 17, Issue 8, 2005, Pages 2076-2080

  Gorantla, Venkata R K ^a,b   Matijević, Egon ^a   Babu, S V ^a,b  

^a CLARKSON UNIVERSITY   (United States)

^b Clarkson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER MATERIALS; OXIDIZING AGENTS; PLANARIZATION; RATE SELECTIVITY;

ADDITIVES; AMINO ACIDS; DISSOLUTION; FREE RADICALS; HYDROGEN PEROXIDE; SOLUTIONS; SURFACE ACTIVE AGENTS;

CHEMICAL REACTIONS;

EID: 17644419968     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm048478f     Document Type: Article

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