Enhancing leakage suppression in carbon-rich silicon junctions

IEEE Electron Device Letters

Volumn 27, Issue 6, 2006, Pages 442-444

  Tan, Chung Foong ^a   Chor, Eng Fong ^a   Lee, Hyeokjae ^b   Quek, Elgin ^b   Chan, Lap ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b Technology   (Singapore)

Author keywords

Carbon; End of range (EOR); Junction leakage; Solid phase epitaxial (SPE)

Indexed keywords

ANNEALING; CARBON; GATES (TRANSISTOR); LEAKAGE CURRENTS; SEMICONDUCTING SILICON;

END OF RANGE (EOR); JUNCTION LEAKAGE; SOLID-PHASE EPITAXIAL (SPE);

SEMICONDUCTOR JUNCTIONS;

EID: 33744727232     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.874127     Document Type: Article

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