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Volumn 87, Issue 1-4, 2005, Pages 795-805
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Plasma emission diagnostics for the transition from microcrystalline to amorphous silicon solar cells
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Author keywords
High pressure; Microcrystalline silicon; Plasma emission spectroscopy
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Indexed keywords
CRYSTALLINE MATERIALS;
HIGH PRESSURE EFFECTS;
OPTIMIZATION;
PHASE TRANSITIONS;
PLASMA WAVES;
PROBABILITY;
SILANES;
SOLAR CELLS;
SPECTROSCOPIC ANALYSIS;
THIN FILMS;
EMISSION PROFILES;
HIGH PRESSURE;
MICROCRYSTALLINE SILICON;
PLASMA EMISSION SPECTROSCOPY;
AMORPHOUS SILICON;
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EID: 17744375414
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2004.07.052 Document Type: Conference Paper |
Times cited : (25)
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References (13)
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