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Volumn 50, Issue 4, 2006, Pages 566-572

Performance and physics of sub-50 nm strained Si on Si1-xGex-on-insulator (SGOI) nMOSFETs

Author keywords

[No Author keywords available]

Indexed keywords

ESTIMATION; OSCILLATIONS; SILICON;

EID: 33646674021     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.03.029     Document Type: Article
Times cited : (5)

References (15)
  • 1
    • 0036927652 scopus 로고    scopus 로고
    • Hoyt JL, Nayfeh HM, Eguchi S, Aberg I, Xia G, Drake T, et al. Strained silicon MOSFET technology. In: IEDM Tech Dig; 2002. p. 23-6.
  • 2
    • 0034794354 scopus 로고    scopus 로고
    • Rim K, Koester S, Hargrove M, Chu J, Mooney PM, Ott J, et al. Strained Si nMOSFETs for high performance CMOS technology. In: Symp on VLSI Tech Dig; 2001. p. 59-60.
  • 3
    • 0141649561 scopus 로고    scopus 로고
    • Hwang JR, Ho JH, Ting SM, Chen TP, Hsieh YS, Huang CC, et al. Performance of 70 nm strained-silicon CMOS devices. In: Symp VLSI Tech Dig; 2003. p. 103-4.
  • 4
    • 33646671343 scopus 로고    scopus 로고
    • 0.2 SRB or "Low Cost" approach. In: Proc SSDM, Tokyo, 2004. p. 16-17.
  • 5
    • 0034785110 scopus 로고    scopus 로고
    • Huang L-J, Chu JO, Goma S, D'Emic CP, Koester SJ, Canaperi DF, et al. Carrier mobility enhancement in strained Si-On-Insulator fabricated by wafer bonding. In Symp VLSI Tech Dig; 2001. p. 57-8.
  • 6
    • 0842331405 scopus 로고    scopus 로고
    • Takagi S, Mizuno T, Tezuka T, Sugiyama N, Numata T, Usuda K, et al. Channel structure design, fabrication and carrier transport properties of strained-Si/SiGe-On-Insulator (Strained-SOI) MOSFETs. In: Proc IEDM Tech Dig; 2003. p. 57-60.
  • 7
    • 20144388696 scopus 로고    scopus 로고
    • x on Insulator (SGOI) CMOSFETs. In: Proc IEEE Int SOI Conf; 2004. p. 209-11.
  • 8
    • 21644464217 scopus 로고    scopus 로고
    • Cai J, Rim K, Bryant A, Jenkins K, Ouyang C, Singh D, et al. Performance comparison and channel length scaling of strained Si FETs on SiGe-on-Insulator (SGOI). In: Proc IEDM Tech Dig; 2004. p. 165-8.
  • 10
    • 0842331413 scopus 로고    scopus 로고
    • Sanuki T, Oishi A, Morimasa Y, Aota S, Kinoshita T, Hasumi R, et al. Scalability of strained silicon CMOSFET and high drive current in the 40 nm gate length technology. In: IEDM Tech Dig; 2003. p. 65-8.
  • 12
    • 84907704789 scopus 로고    scopus 로고
    • Pretet J, Matsumoto T, Poiroux T, Cristoloveanu S, Gwoziecki R, Raynaud C, et al. New mechanism of body charging in partially depleted SOI-MOSFETs with ultra-thin gate oxides. In: Proc ESSDERC; 2002. p. 515-8.
  • 13
    • 33645519414 scopus 로고    scopus 로고
    • Ballistic and pocket limitations of mobility in nanometer Si metal-oxide semiconductor field-effect transistor
    • Lusakowski J., Knap W., Meziani Y., Cesso J.-P., El Fatimy A., Tauk R., et al. Ballistic and pocket limitations of mobility in nanometer Si metal-oxide semiconductor field-effect transistor. Appl Phys Lett 87 (2005) 053507
    • (2005) Appl Phys Lett , vol.87 , pp. 053507
    • Lusakowski, J.1    Knap, W.2    Meziani, Y.3    Cesso, J.-P.4    El Fatimy, A.5    Tauk, R.6
  • 14
    • 33745153424 scopus 로고    scopus 로고
    • Andrieu F, Ernst T, Lime F, Rochette F, Romanjek K, Barraud S, et al. Experimental and comparative investigation of low and high field transport in substrate-and process-induced strained nanoscaled MOSFETs. In: Symp VLSI Tech Dig, Kyoto, 2005. p.176-7.
  • 15
    • 14844320545 scopus 로고    scopus 로고
    • Characterization of the effective mobility by split C(V) technique in sub 0.1 μm Si and SiGe PMOSFETs
    • Romanjek K., Andrieu F., Ernst T., and Ghibaudo G. Characterization of the effective mobility by split C(V) technique in sub 0.1 μm Si and SiGe PMOSFETs. Solid-State Electron 49 (2005) 721-726
    • (2005) Solid-State Electron , vol.49 , pp. 721-726
    • Romanjek, K.1    Andrieu, F.2    Ernst, T.3    Ghibaudo, G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.