SCOPUS 정보 검색 플랫폼

Volumn 5, Issue 3-4 SPEC., 2002, Pages 187-193

Rapid thermal annealing procedure for densification of sol-gel indium tin oxide thin films

(9) Daoudi, K a,b Sandu, C S c Teodorescu, V S c Ghica, C c Canut, B b Blanchin, M G b Roger, J A b Oueslati, M a Bessais B d

a FACULTÉ DES SCIENCES DE TUNIS (Tunisia)

b UNIVERSITÉ LYON 1 (France)

c NATIONAL INSTITUTE OF MATERIALS PHYSICS (Romania)

d Institut National de Recherche Scientifique et Technique Tunis (Tunisia)

Author keywords

Crystallization; ITO; Morphology; RTA; Sol gel

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLIZATION; DENSIFICATION; ELECTRON DIFFRACTION; GRAIN SIZE AND SHAPE; MORPHOLOGY; RAPID THERMAL ANNEALING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SOL-GELS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

MICROGRAPHS;

INDIUM COMPOUNDS;

EID: 0037285813 PISSN: 14630184 EISSN: None Source Type: Journal
DOI: 10.1016/S1463-0184(02)00028-X Document Type: Article

Times cited : (23)

References (12)

1
- 0034247128
- Transparent conducting oxides
- August
- Transparent conducting oxides, MRS Bulletin, August 2000, Volume 25, No. 8.
- (2000) MRS Bulletin , vol.25 , Issue.8

2
- 0027659536
- Shigesato Y., Paine D.C., Hayens T.E. Jpn. J. Appl. Phys. 32:1993;L1352.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Shigesato, Y.¹ Paine, D.C.² Hayens, T.E.³

3
- 0019076275
- Smith J.F., Aronson A.J., Chen D., Class W.H. Thin Solid Films. 72:1980;469.
- (1980) Thin Solid Films , vol.72 , pp. 469
- Smith, J.F.¹ Aronson, A.J.² Chen, D.³ Class, W.H.⁴

4
- 0013416773
- Manifacier J.C., Szepessy L., Bress J.F., Perotin M. Mater. Res. Bull. 14:1979;140.
- (1979) Mater. Res. Bull , vol.14 , pp. 140
- Manifacier, J.C.¹ Szepessy, L.² Bress, J.F.³ Perotin, M.⁴

5
- 0027222416
- Bessaïs B., Mliki N., Bennaceur R. Semicond. Sci. Tecnol. 8:1993;116-121.
- (1993) Semicond. Sci. Tecnol , vol.8 , pp. 116-121
- Bessaïs, B.¹ Mliki, N.² Bennaceur, R.³

6
- 0001101167
- Tahar R.B., Ban T., Ohya Y., Takahashi Y. J. Appl. Phys. 83:1998;2139.
- (1998) J. Appl. Phys , vol.83 , pp. 2139
- Tahar, R.B.¹ Ban, T.² Ohya, Y.³ Takahashi, Y.⁴

7
- 0034509124
- Alam M.J., Cameron D.C. Thin Solid Films. 377-378:2000;455-459.
- (2000) Thin Solid Films , vol.377-378 , pp. 455-459
- Alam, M.J.¹ Cameron, D.C.²

8
- 0035311641
- Cheng J., Meng Z. Thin Solid Films. 385:2001;5-10.
- (2001) Thin Solid Films , vol.385 , pp. 5-10
- Cheng, J.¹ Meng, Z.²

9
- 0037157423
- Wakagi M., Chahara K., Onisawa K., Kawakubo Y., Kichikawa T., Satoh T., Minemura T. Thin Solid Films. 411:2002;46-49.
- (2002) Thin Solid Films , vol.411 , pp. 46-49
- Wakagi, M.¹ Chahara, K.² Onisawa, K.³ Kawakubo, Y.⁴ Kichikawa, T.⁵ Satoh, T.⁶ Minemura, T.⁷

10
- 0013413450
- in press
- Boudiar T., Sandu C.S., Canut B., Blanchin M.G., Teodorescu V.S., Roger J.A. J. Sol-Gel Sci. Technol. in press:2002;in.
- (2002) J. Sol-Gel Sci. Technol.
- Boudiar, T.¹ Sandu, C.S.² Canut, B.³ Blanchin, M.G.⁴ Teodorescu, V.S.⁵ Roger, J.A.⁶

11
- 0013460875
- Daoudi K., Canut B., Blanchin M.G., Sandu C.S., Teodorescu V.S., Roger J.A. Mater. Sci. Eng. C21:2002;313-317.
- (2002) Mater. Sci. Eng. , vol.C21 , pp. 313-317
- Daoudi, K.¹ Canut, B.² Blanchin, M.G.³ Sandu, C.S.⁴ Teodorescu, V.S.⁵ Roger, J.A.⁶

12
- 0033153966
- Chatelon J.P., Terrier C., Roger J.A. Semicond. Sci. Technol. 14:1999;642.
- (1999) Semicond. Sci. Technol , vol.14 , pp. 642
- Chatelon, J.P.¹ Terrier, C.² Roger, J.A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.