Experimental determination of the inelastic mean free path (IMFP) of electrons in selected oxide films applying surface excitation correction

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 624-627

  Gurban, S ^a   Gergely, G ^a   Toth, J ^b   Varga, D ^b   Jablonski, A ^c   Menyhard, M ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^c INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

IMFP; Insulators; Surface correction

Indexed keywords

ALUMINUM COMPOUNDS; COMPUTER SOFTWARE; COPPER; ELECTRIC INSULATORS; ELECTRON SPECTROSCOPY; GOLD; MAGNESIUM COMPOUNDS; MONTE CARLO METHODS; NICKEL; OXIDES; SILICON; SILVER; THIN FILMS;

ELASTIC PEAK ELECTRON SPECTROSCOPY (EPES); ENERGY SHIFT; IMFP; SURFACE CORRECTION;

ELECTRONS;

EID: 33646560352     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2302     Document Type: Conference Paper

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