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Volumn 153, Issue 6, 2006, Pages

Atomic-scale evaluation of Si(111) surfaces finished by the planarization process utilizing SiO2 particles mixed with water

Author keywords

[No Author keywords available]

Indexed keywords

FINISHING; LOW ENERGY ELECTRON DIFFRACTION; PARTICLES (PARTICULATE MATTER); SCANNING TUNNELING MICROSCOPY; SILICA; WATER;

EID: 33646424091     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2191247     Document Type: Article
Times cited : (12)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.