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Volumn 34, Issue 4, 2005, Pages 439-443

Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining

(6) Kubota, Akihisa a Mimura, Hidekazu a Inagaki, Kouji a Arima, Kenta a Mori, Yuzo a Yamauchi, Kazuto a

Author keywords

Atomic force microscopy (AFM); Elastic emission machining (EEM); Low energy electron diffraction (LEED); Silicon carbide; Surface morphology

Indexed keywords

ATOMIC FORCE MICROSCOPY; EPITAXIAL GROWTH; INTERFEROMETRY; LOW ENERGY ELECTRON DIFFRACTION; MACHINING; SEMICONDUCTOR MATERIALS; SURFACE PHENOMENA; SURFACE PROPERTIES; THERMAL CONDUCTIVITY; THIN FILMS;

DEFECT-FREE SURFACES; ELASTIC EMISSION MACHINING (EEM); EPITAXIAL FILMS; HIGH-POWER DEVICE APPLICATIONS;

SILICON CARBIDE;

EID: 18144395454 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-005-0124-3 Document Type: Conference Paper

Times cited : (22)

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