Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

  Sandner, Thilo ^a   Schmidt, Jan Uwe ^a   Schenk, Harald ^a   Lakner, Hubert ^a   Yang, Minghong ^b   Gatto, Alexandre ^b   Kaiser, Norbert ^b   Braun, Stefan ^c   Foltyn, Thomas ^c   Leson, Andreas ^c  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^c FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

High optical power density; Highly reflective coatings; Micro Scanning Mirror; MOEMS; NIR VIS UV

Indexed keywords

ABSORPTION; ALUMINUM; BROADBAND NETWORKS; CMOS INTEGRATED CIRCUITS; DENSITY (OPTICAL); GOLD; LASER OPTICS; MIRRORS; SILVER;

HIGH OPTICAL POWER DENSITY; HIGHLY REFLECTIVE COATINGS; MICRO SCANNING MIRRORS (MSM); NIR-VIS-UV;

OPTICAL COATINGS;

EID: 33646205927     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.644626     Document Type: Conference Paper

References (12)

1. A. Wolter. S.T. Hsu, H. Schenk, H. Lakner. "Applications and requirements for MEMS scanner mirrors". Proc. SPIE 5719, p. 64-75, (2005).
2. T. Sandner, J.U. Schmidt, H. Schenk, H. Lakner et al, "Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range". Proc. SPIE 5721, p. 72-80, (2005).
3. K. E. Peterson: "Silicon Torsional Scanning Mirror", IBM J. Res. Develop., Vol. 24, No 5, p. 631-637, (1980).
4. W. Dötzel et al.: "Silicon Mirrors and Micromirror Arrays for Spatial Laser Beam Modulation", IEEE, Transducers 97, Int. Conf. Solid-State Sensors and Actuators, Chicago, pp. 81-84 (1997).
5. H. Schenk, et al.: "A new driving principle for micromechanical torsional actuators", Micro Electro Mechanical Systems 1099, New York, NY: The American Society of Mechanical Engineers ASME, p. 333-338, (1999).
6. European Patent EP I 123 526 B I.
7. H. Schenk, et al.: "Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors", SPIE Proc. 4178, p. 116-125, (2000).
8. H. Schenk, et al.: "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5, p. 715-722, (2000).
9. K.-U. Roscher et al.: "Driver ASIC for synchronized excitation of resonant Micro-Mirrors", Proc. SPIE 4985, p. 121-130, (2003).
10. H. Schenk et al.: "Optical MEMS for Advanced Spectrometers", IEEE/LEOS Optical MEMS 2005, p. 117-118, (2005).
11. M. Yang, A. Gatto, N. Kaiser et al.: "VUV optical coatings for the next-generation micro-mechanical mirrors", SPIE Proc. 5963, (2005).
12. H. Grüger, A. Wolter, T. Schuster, H. Schenk, H. Lakner, "Realization of a spectrometer with micromachined scanning grating", SPIE Photonics Fabrication Vol. 4945, (2002).