Driver ASIC for synchronized excitation of resonant micro-mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 121-130

  Roscher, Kai Uwe ^a   Fakesch, Uwe ^b   Schenk, Harald ^a   Lakner, Hubert ^a   Schlebusch, Dirk ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Charge pump; MEMS; MEMS driver; Micro scanning mirror; MOEMS; Resonant excitation; Resonant scanner; Scanner driver; Synchronized excitation

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CAPACITANCE; ELECTRIC POTENTIAL; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; PRINTED CIRCUIT BOARDS; SCANNING;

MICROMIRRORS;

MIRRORS;

EID: 0037719900     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477810     Document Type: Conference Paper

References (4)

1. rd Int. Conf. On Micro Opto Electro Mechanical Systems, p. 3-10, Aug. 31-Sep. 01 Mainz 1999
2. H. Schenk, P. Dürr, D. Kunze, H. Kück, A new driving principle for micromechanical torsional actuators, Micro-Electro-Mechanical Systems, MEMS-Vol.1, Conf.: 1999 Int. Mech. Eng. Congr. & Exh., Nov. 14-19, Nashville, p 333-338, 1999
3. H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, H. Kück, Large deflection micromechanical scanning mirrors for linear scans and pattern generation, Journal of selected topics in Quantum Electronics, Vol. 6, No 5, p.715-722, 2000
4. H. Schenk, A. Wolter, H. Lakner, Design optimization of an electrostatically driven Micro Scanning Mirror, Conf. Micromachining and Microfabrication, San Francisco, Proc. of SPIE Vol. 4561, p. 35-44, 2001