VUV optical coatings for the next-generation micro-mechanical mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5963, Issue , 2005, Pages

  Yang, Minghong ^a   Gatto, Alexandre ^a   Kaiser, Norbert ^a   Schmidt, Jan Uwe ^b   Sandner, Thilo ^b   Heber, Jörg ^b   Schenk, Harald ^b   Lakner, Hubert ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Micro mirrors; Spatial light modulator; Thin films; Vacuum UV

Indexed keywords

LIGHT MODULATION; METAL ANALYSIS; MIRRORS; SCANNING; THIN FILMS; ULTRAVIOLET RADIATION;

MICRO MIRRORS; VACUUM UV; VUV OPTICAL COATINGS;

OPTICAL COATINGS;

EID: 33144482181     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.625138     Document Type: Conference Paper

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