Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2500-2504

  Bennett, P A ^a   Ashcroft, B ^a   He, Zhian ^a   Tromp, R M ^b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH; DEPOSITION; ELECTRON MICROSCOPY; GRAIN SIZE AND SHAPE; OSCILLATIONS; REACTION KINETICS; SHRINKAGE; TITANIUM COMPOUNDS;

EQUILIBRIUM SHAPE; LOW ENERGY ELECTRON MICROSCOPY; OSCILLATING CYCLE; TITANIUM SILICIDE NANOWIRES;

NANOSTRUCTURED MATERIALS;

EID: 0036883121     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1525006     Document Type: Article

References (25)

1. C. Preinesberger, V. S. R. Kalka, and M. Dahne-Prietsch, J. Phys. D 31. L43 (1998).
2. C. Preinesberger, S. K. Berger, S. Vandre, T. Kalka, and M. Dahne, J. Appl. Phys. 91, 1695 (2002).
3. Y. Chen, D. A. A. Ohlberg, G. Medeiros-Riberiro, Y. A. Chang, and R. S. Williams, Appl. Phys. Lett. 76, 4004 (2000).
4. J. Nogami, B. Z. Liu, M. V. Katkov, C. Ohbuchi, and N. O. Birge, Phys. Rev. B 63, 233305 (2001).
5. Y. Huang, X. Duan, Q. Wei, and C. M. Lieber, Science 291, 630 (2001).
6. M. Ouyang, J.-L. Huang, C. L. Cheung, and C. M. Lieber, Science 292, 702 (2001).
7. C. Dekker, Phys. Today May, 23 (1999).
8. M. A. Nicolet and S. S. Lau, in VLSI Microstructure Science, edited by N. G. Einspruch and G. B. Larrabee (Academic, New York, 1983), p. 330.
9. A. H. Reader, A. H. van Ommen, P. J. Weijs, R. A. M. Wolters, and D. J. Oostra, Rep. Prog. Phys. 56, 1397 (1993).
10. R. T. Tung, Mater. Chem. Phys. 32, 107 (1992).
11. V. Scheuch, B. Voigtlander, and H. P. Bonzel, Surf. Sci. 372, 1 (1997).
12. S. H. Brongersma, M. R. Castell, D. D. Perovic, and M. Zinke Allmang, Phys. Rev. Lett. 80, 3795 (1998).
13. K. L. Kavanagh, M. C. Reuter, and R. M. Tromp, J. Cryst. Growth 173, 393 (1997).
14. J. L. McChesney, A. Kirakosian, R. Bennewitz, J. N. Crain, J.-L. Lin, and F. J. Himpsel, Nanotechnology 13, 545 (2002).
15. Z. He, M. Stevens, D. J. Smith, and P. A. Bennett, Surf. Sci. (accepted).
16. R. M. Tromp and M. C. Reuter, Ultramicroscopy 50, 171 (1993).
17. F. M. Ross, P. A. Bennett, R. M. Tromp, J. Tersoff, and M. Reuter, Micron 30, 21 (1999).
18. P. A. Bennett and H. von Kaenel, J. Phys. D 32, R71 (1999).
19. P. A. Bennett, D. J. Smith, and I. K. Robinson, Appl. Surf. Sci. 180, 65 (2000).
20. R. M. Tromp, F. K. LeGoues, and M. C. Reuter, Phys. Rev. Lett. 74, 2706 (1995).
21. H. von Kaenel, J. Henz, M. Ospelt, and P. Wachter, Phys. Scr., T 19, 158 (1987).
22. K. Ezoe, H. Kuriyama, R. Yamamoto, S. Ohara, and S. Matsumoto, Appl. Surf. Sci. 130-32, 13 (1998).
23. J. Tersoff and R. M. Tromp, Phys. Rev. Lett. 70, 2782 (1993).
24. F. K. LeGoues, M. C. Reuter, J. Tersoff, M. Hammar, and R. M. Tromp, Phys. Rev. Lett. 73, 300 (1994).
25. J. Tersoff, A. W. Denier van der Gon, and R. M. Tromp, Phys. Rev. Lett. 70, 1143 (1993).