Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6109, Issue , 2006, Pages

  Brunet, M ^a   Dubreuil, P ^a   Scheid, E ^a   Sanchez, J L ^a  

^a LAAS CNRS   (France)

Author keywords

DRIE; High aspect ratio trenches; High capacitance density; Integrated capacitor; MIM

Indexed keywords

CAPACITORS; ELECTRIC RESISTANCE; MICROELECTROMECHANICAL DEVICES; POLYSILICON; POWER CONVERTERS; POWER ELECTRONICS; REACTIVE ION ETCHING;

DEEP REACTIVE ION ETCHING (DRIE); HIGH ASPECT RATIO TRENCHES; HIGH CAPACITANCE DENSITY; INTEGRATED CAPACITORS;

MIM DEVICES;

EID: 33646023709     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.646121     Document Type: Conference Paper

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