Modeling the response of surface micromachined thermal actuators

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 377-382

  Atre, Amarendra P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Microsystems; Thermal Actuators

Indexed keywords

DEFLECTION RESPONSE; MICROSYSTEMS; THERMAL ACTUATORS; TRANSIENT RESPONSE;

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; OPTIMIZATION; SURFACE STRUCTURE; THERMAL EXPANSION;

MICROACTUATORS;

EID: 33645983644     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79197     Document Type: Conference Paper

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