Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue , 2000, Pages 148-158

  Allen, P B ^a   Boydston, N C ^a   Howard, J T ^a   Ko, S Y ^a   Kolesar, E S ^a   Ruff, M D ^a   Wilken, J M ^a   Wilks, R J ^a  

^a TEXAS CHRISTIAN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; MICROELECTROMECHANICAL DEVICES; POLYCRYSTALLINE MATERIALS; SILICON; THERMAL EFFECTS;

ELECTROCHEMICAL MICROACTUATORS;

MICROACTUATORS;

EID: 0034546734     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395623     Document Type: Conference Paper

References (24)