Dynamic response of surface micromachined horizontal beam flexure actuators

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 385-392

  Atre, Amarendra P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Microsystems; Thermal Actuators

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ENERGY EFFICIENCY; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; REMOTE SENSING; SURFACE PHENOMENA;

BEAM FLEXURE ACTUATORS; MICROSYSTEMS; SHAPE FACTOR; THERMAL ACTUATORS;

DYNAMIC RESPONSE;

EID: 21644481432     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-59040     Document Type: Conference Paper

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