Excimer laser material processing - State of the art and new approaches in microsystem technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6107, Issue , 2006, Pages

  Pfleging, W ^a   Przybylski, M ^b   Bruckner H J ^c  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b ATL Lasertechnik GmbH   (Germany)

^c UNIVERSITY OF APPLIED SCIENCES EMDEN LEER   (Germany)

Author keywords

Ablation; Excimer; Laser LIGA; Micro fluidics; Micro optics; Modification; Polymer; Waveguide writing

Indexed keywords

FABRICATION; LASER ABLATION; LASER PULSES; MICROMACHINING; MICROOPTICS; MODIFICATION; OPTICAL WAVEGUIDES; POLYMERS;

LASER-LIGA; MATERIAL PROCESSING; MICRO-FLUIDICS; WAVEGUIDE WRITING;

EXCIMER LASERS;

EID: 33645959840     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.647425     Document Type: Conference Paper

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