Fabrication and characterization of single-mode integrated polymer waveguide components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5451, Issue , 2004, Pages 32-39

  Gaganidze, Ermile ^a   Litfin, Karsten ^a   Böhm, Johannes ^a   Finke, Steffi ^a   Henzi, Patrie ^a   Heidinger, Roland ^a   Pfleging, Wilhelm ^a   Steinbock, Lothar ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Excimer; Index matched materials; Integrated optics; Laser patterning; Nd:YAG; PMMA; Polymer waveguide

Indexed keywords

CHEMICAL LASERS; DYES; EXCIMER LASERS; FLUORINE CONTAINING POLYMERS; INTEGRATED OPTICS; LIGHT MODULATORS; MIXTURES; OPTICAL WAVEGUIDES; OPTIMIZATION; PHOTOLITHOGRAPHY; POLYMERIZATION; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SURFACE ROUGHNESS; WAVELENGTH DIVISION MULTIPLEXING;

INDEXED-MATCHED MATERIALS; LASER-ASSISTED MICRO-PATTERNING; ND:YAG LASER; PMMA; POLYMER WAVEGUIDE; Y-SPLITTERS;

INTEGRATED OPTOELECTRONICS;

EID: 12344270057     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544768     Document Type: Conference Paper

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