An integrated optical biochemical sensor fabricated using rapid-prototyping techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4982, Issue , 2003, Pages 185-195

  Chang Yen, David A ^a   Gale, Bruce K ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

Biosensor; Evanescent; Optical; Rapid Prototyping; SU 8

Indexed keywords

ADHESION; CHEMICAL SENSORS; ELECTROSTATICS; FLUORESCENCE; GLASS; INTEGRATED OPTICS; OXYGEN; RAPID PROTOTYPING; SUBSTRATES; WAVEGUIDES;

CHEMICAL INTERACTION;

BIOSENSORS;

EID: 0038397617     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478164     Document Type: Conference Paper

References (39)

1. J. M. Eighenholz, "Integrated packaging and testing of optical MEMS", Advanced Packaging, 11, 27-29, 2002
2. D. I., Amey, B. E. Taylor, D. M. Horowitz and J. Samuel, "Next-generation packaging for fiber optics and MEMS", Advanced Packaging, 11, 30-33, 2002
3. M. Robert, "MEMS packaging and microassembly challenges", Proceedings of SPIE - The International Society for Optical Engineering, 3891, 22-25, 1999
4. B. Rose, O. Leistiko, "End-fire coupling between a buried waveguide structure and a Si photodetector", Proceedings of SPIE - The International Society for Optical Engineering, 2686, 175-181, 1996
5. Y. Zhou, Y. L. Lam, S. D. Cheng and C. H. Kam, "Step-etched prism coupling for optical waveguide biosensors", Proceedings of SPIE - The International Society for Optical Engineering, 3491, 1163-1166, 1998
6. J. Mueller, D. Zurhelle, K. Fischer, A. Loeffler-Peters and R. Hoffmann, "Integrated optical pressure sensor with coupling structures", Proceedings of SPIE - The International Society for Optical Engineering, 1794, 167-178, 1993
7. S. Goel and D. L Naylor, "Micro-machined structure for coupling optical fibers to integrated optical waveguides", Proceedings of SPIE - The International Society for Optical Engineering, 1396, 404-410, 1991
8. J. Backlund, "Multifunctional waveguide grating couplers for integrated optics", Doktorsavhandlingar vid Chalmers Tekniska Hogskola. 1714, 48, 2001
9. O. Kohls and T. Scheper, "Setup of a fiber optical multisensor-system and its applications in biotechnology", 70, 121-130, 2000
10. B. A. A. Dremel, S.-Y. Li and R. D. Schmid, "On-line determination of glucose and lactate concentrations in animal cell culture based on fibre optic detection of oxygen in flow-injection analysis", Biosens. Bioelectron., 7, 133-39, 1992
11. M. Li, H. Ai, D. K. Mills, Y. M. Lvov, M. J. McShane and B. K. Gale, "Using Microfabrication and Electrostatic Layer-by-Layer (LbL) Self-Assembly Technologies to Improve the Growth and Alignment of Smooth Muscle Cells", Proc. 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison, Wisconsin, USA, 109-114, 2002
12. F. Loth, S. A. Jones, D. P. Giddens, H. Bassiouny, S. Glagov and C. K. Zarins, "Measurements of velocity and wall shear stress inside a PTFE vascular graft model under steady flow conditions", J. Biomech. Eng., 119, 187-194, 1997
13. J. L., Ricci, A. G. and Gona and H. Alexander, "In vitro tendon cell growth rates on a synthetic fiber scaffold material and on standard culture plates", J. Biomed. Mater. Res., 25, 651-666, 1991
14. A. Weber and J. S. Schultz, "Fiber-optic fluorimetry in biosensors. Comparison between evanescent wave generation and distal-face generation of fluorescent light", Biosensors & Bioelectronics, 7, 193-197, 1992
15. R. Carswell and A. R. Khoie, "Optical oxygen sensor based on RUDPP fluorescence quenching", Soc. Photo-Opt. Instru., 2705, 22-30, 1996
16. D. Chang-Yen, Y. Lvov, M. McShane and B. Gale, "Electrostatic Self-Assembly of a Ruthenium-Based Oxygen Sensitive Dye Using Polyion-Dye Interpolyelectrolyte Formation", Sens. Actuators, B, Chem., accepted 2002
17. K. Baba, T. Iden and M. Miyagi, "Theoretical characteristics of TM-pass waveguide polarizers for glass integrated optics using periodic dielectric multilayers as cladding", Proceedings of SPIE - The International Society for Optical Engineering, 4277, 91-98, 2001
18. C. Fitzpatrick, M. Abid, G. Netherwood and R. Levy, "New integrated optics architecture including onboard sensing elements", Proceedings of SPIE - The International Society for Optical Engineering, Novel Optical Systems Design and Optimization III, San Diego, USA, 4092, 139-144, 2000
19. A. Tervonen, "Challenges and opportunities for integrated optics in optical networks", Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Integrated Optics Devices III, San Jose, CA, USA, 3620, 2-11, 1999
20. W.-C. Chuang, C.-Y. Chang, C.-C. Lai and K.-C. Lin, "Integrated-optics multimode-interference wavelength division multiplexer for optical communication", Fiber and Integrated Optics, 18, 93-104, 1999
21. A. M. Bacon, "Integrated optics expands its reach", Lasers & Optronics, 17, 13-15, 1998
22. L. Luo, C. Li, S. Wang, W. Huang, C. Wu, H. Yang, H. Jiang, Q. Gong,Y. Yang and S. Feng, "Optical microstructures fabricated by femtosecond laser two-photon polymerization", Journal of Optics A: Pure and Applied Optics, 3, 489-492, 2001
23. H. Hosokawa, N. Horie and T. Yamashita, "Mass-producible optical guided-wave devices fabricated by photopolymerization", Proceedings of SPIE - The International Society for Optical Engineering, Photopolymer Device Physics, Chemistry, and Applications II, Jul 24-26 1991, San Diego, CA, USA, 1559, 229-237, 1991
24. H. Hosokawa, N. Horie and T. Yamashita, "Simultaneous fabrication of grating couplers and an optical waveguide by photopolymerization", Integrated Photonics Research - Topical Meeting, Technical Digest on Integrated Photonics Research, Hilton Head, SC, USA, 26, 1990
25. A. Rogner and H. Pannhoff, "Mass fabrication of passive polymer multimode and single-mode waveguide devices" Conference on Optical Fiber Communication, Technical Digest Series, Proceedings of the 1994 Optical Fiber Communication Conference, San Jose, CA, USA, 4, 279-280, 1994
26. L. U. Kempen, R. E. Kunz, M. T. Gale, "Micromolded structures for integrated optical sensors", Proceedings of SPIE - The International Society for Optical Engineering, Micromachining and Microfabrication Process Technology, Austin, TX, 2639, 278-285, 1995
27. H.-D. Bauer, W. Ehrfeld, T. Paatzsch, I. Smaglinski and L.Weber, "Advanced micromolding of optical components", Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Miniaturized Systems with Micro-Optics and MEMS, Santa Clara, CA, USA, 3878, 261-270, 1999
28. V. Seidemann, S. Butefisch and S. Buttgenbach, "Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers", Sensors and Actuators, A: Physical, Transducers'01 Eurosensors XV, Munich, 97-98, 457-461, 2001
29. V. Seidemann, J. Rabe, M. Feldmann and S. Buttgenbach, "SU8-micromechanical structures with in situ fabricated movable parts", Microsystem Technologies, 8, 348-350, 2002
30. V. Seidemann and S. Buttgenbach, "A novel fabrication process for 3D meander shaped micro coils in SU8 dielectric and their application to linear micro motors", Proceedings of SPIE - The International Society for Optical Engineering, MEMS Design, Fabrication, Characterization, and Packaging, Edinburgh, 4407, 304-309, 2001
31. S. Butefisch, V. Seidemann and S. Buttgenbach, "Novel micro-pneumatic actuator for MEMS", Sensors and Actuators, A: Physical, Transducers'01 Eurosensors XV, Munich, 97-98, 638-645, 2002
32. W. Y. Liu and A. Harkar, "Novel technique of thin photoresist micromachining for submillimeter wave circuits", Proceedings of SPIE - The International Society for Optical Engineering, Micromachined Devices and Components VI, Sep 18-Sep 19 2000, Santa Clara, CA, USA, 4176, 272-279, 2000
33. J. G. Partridge and S. R. Davies, "Micromachined submillimetre-wave frequency multipliers", Proceedings of SPIE - The International Society for Optical Engineering, Smart Electronics and MEMS II, Melbourne, VIC, 4236, 170-178, 2000
34. J. G. Partridge and S. R. Davies, "Microfabrication technology for waveguide components at submillimetre wavelengths", Proceedings of SPIE - The International Society for Optical Engineering, Smart Electronics and MEMS II, Melbourne, VIC, 4236, 149-156, 2000
35. H. Möhwald, Protein Architecture - Interfacing Molecular Assemblies and Immobilization Biotechnology, 125, Ed. Yuri Lvov, Marcell Dekker Inc., New York, 2000
36. S. Camou, J. P. Gouy, H. Fujita and T. Fujii, "Integrated 2-D optical lenses in PDMS layer to improve fluorescence spectroscopy using optical fibers", Proceedings of Sensors 2002, Orlando, 1-17, 2002
37. Y. Lvov, K. Ariga, I. Ichinose and T. Kunitake, "Assembly of multicomponent protein films by means of electrostatic layer-by-layer adsorption", J. Am. Chem. Soc., 117, 6117-6122, 1995
38. P. A. Chiarelli, M. S. Johal, D. J. Holmes, J. L . Casson, J. M. Robinson and H.-L. Wang, "Polyelectrolyte spin-assembly", Am. Chem. Soc., 18, 168-173, 2002
39. A. K. McEvoy, C. M. McDonaugh and B. D. MacCraith, "Development of a fibre-optic oxygen sensor based on quenching of a ruthenium complex entrapped in a porous sol-gel film", Soc. Photo-Opt. Instru., 2508, 190-198, 1995