Direct laser-assisted processing of polymers for micro-fluidic and micro-optical applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 346-356

  Pfleging, W ^a   Bohm J ^a   Finke, S ^a   Gaganidze, E ^a   Hanemann, Th ^a   Heidinger, R ^a   Litfin, K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Excimer; Micro fluidic; Micro optics; Nd:YAG; Polymer ablation; Polymer modification; Polymer waveguides; Rapid manufacturing; Refractive index variation

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; ELECTROPHORESIS; EXCIMER LASERS; FLUIDICS; LASER ABLATION; LASER PULSES; MICROOPTICS; NEODYMIUM LASERS; OPTICAL WAVEGUIDES; POLYMETHYL METHACRYLATES; ULTRAVIOLET RADIATION;

ELECTROPHORESES CHIPS; POLYMER ABLATION; POLYMER WAVEGUIDES; THERMAL INDUCED DAMAGE;

LASER APPLICATIONS;

EID: 0345293237     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479406     Document Type: Conference Paper

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