Laser micromaching of polymeric mold inserts for rapid prototyping of PMMA-devices via photomolding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue , 2002, Pages 318-329

  Pfleging, Wilhelm ^a   Hanemann, T ^a   Bernauer, W ^a   Torge, M ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Excimer; Frequency quadrupled Nd:YAG; Laser micromachining; Micromolding; Mold inserts; Photomolding; Polymer; Rapid fabrication technologies

Indexed keywords

ASPECT RATIO; EXCIMER LASERS; INJECTION MOLDING; MICROMACHINING; PLASTIC MOLDS; POLYMETHYL METHACRYLATES; ULTRAVIOLET RADIATION;

LASER MICROMACHINING;

LASER BEAM EFFECTS;

EID: 0036405185     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.470638     Document Type: Conference Paper

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