Marvelous MEMs: Advanced IC sensors and microstructures for high volume applications

IEEE Circuits and Devices Magazine

Volumn 22, Issue 2, 2006, Pages 8-28

  Bryzek, Janusz ^a   Roundy, Shad ^a   Bircumshaw, Brian ^a   Chung, Charles ^a   Castellino, Kenneth ^a   Stetter, Joseph R ^b   Vestel, Michael ^b  

^a LV Sensors   (United States)

^b SRI INTERNATIONAL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MICROSTRUCTURE; PIEZOELECTRICITY; SENSORS; SILICON WAFERS; THERMOELECTRICITY;

INTEGRATED CIRCUIT (IC) SENSORS; MEMS MICROSTRUCTURES; MICROELECTROMECHANICAL SYSTEMS (MEMS); SENSING TECHNOLOGIES; VENTURE CAPITAL FUNDING;

MICROELECTROMECHANICAL DEVICES;

EID: 33645820433     PISSN: 87553996     EISSN: None     Source Type: Journal    
DOI: 10.1109/MCD.2006.1615241     Document Type: Article

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