Carbon-MEMS architectures for 3D microbatteries

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 295-302

  Wang, Chunlei ^a   Taherabadi, Lili ^a   Jia, Guangyao ^a   Kassegne, Sam ^a   Zoval, Jim ^a   Madou, Marc ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

C MEMS; Li intercalation; Microbattery; Photoresist; Pyrolysis; Simulation

Indexed keywords

ASPECT RATIO; CARBON; CURRENT DENSITY; ELECTRODES; FABRICATION; LITHIUM; PHOTORESISTS; PYROLYSIS;

C-MEMS; LI INTERACTION; MICROBATTERY; MINIATURIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 9144228211     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.548755     Document Type: Conference Paper

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