Evaluation of microfabricated deformable mirror systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3353, Issue , 1998, Pages 790-804

  Cowan, William D ^a   Lee, Max K ^a   Bright, Victor M ^b   Welsh, Byron M ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF COLORADO   (United States)

Author keywords

Adaptive optics; Beam steering; Deformable mirrors; Micro electro mechanical systems (MEMS); Micromirrors

Indexed keywords

ABERRATIONS; ADAPTIVE OPTICS; COMPOSITE MICROMECHANICS; COST REDUCTION; DEFORMATION; DIGITAL TO ANALOG CONVERSION; LASER PULSES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MIRRORS; PHOTOLITHOGRAPHY; POLYSILICON; SURFACE MICROMACHINING; THICKNESS MEASUREMENT; VOLTAGE REGULATORS; DESIGN; FABRICATION;

ABERRATION CORRECTIONS; ACTIVE ELEMENTS; ADAPTIVE OPTIC SYSTEMS; ADAPTIVE OPTICS SYSTEMS; ARRAY SIZES; BEAM STEERING; CONTROL VOLTAGES; DEFORMABLE MIRRORS; DIGITAL TO ANALOG CONVERTER DAC; HIGH VOLTAGE AMPLIFIERS; HIGH-ORDER ABERRATIONS; LENSLET ARRAYS; LOW COSTS; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICRO-MIRROR ARRAYS; MICROFABRICATED; MICROMACHINED; MICROMIRRORS; MIRROR ARRAYS; POLYSILICON SURFACES; PROTOTYPING PROCESS; REDUCED COSTS; SQUARE GRIDS; DEFORMABLE MIRROR; MICROMIRROR;

OPTICAL SYSTEMS; MIRRORS;

EID: 0032265947     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321696     Document Type: Conference Paper

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