Optimization-based operation of micromachined deformable mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3353, Issue , 1998, Pages 902-909

  Vdovin, Gleb V ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Adaptive optics; Deformable mirror; MEMS; Micromachining

Indexed keywords

ADAPTIVE MIRRORS; BEAM BRIGHTNESS; CLOSED-LOOP SYSTEMS; DEFORMABLE MIRROR; FAR FIELDS; HIGH QUALITIES; MICROMACHINED; MICROMACHINED DEFORMABLE MIRRORS; OPTICAL ABERRATIONS; OPTIMIZATION SYSTEMS; QUASI STATICS; SPACE-BASED LASERS;

ABERRATIONS; COMPOSITE MICROMECHANICS; DEFORMATION; INTEGRATED OPTICS; LASER PULSES; MEDICAL IMAGING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL SYSTEMS; OPTIMIZATION; PHOTOLITHOGRAPHY; SPACECRAFT OBSERVATORIES; TELECOMMUNICATION SYSTEMS; ADAPTIVE OPTICS; SEMICONDUCTING SILICON;

GEOMETRICAL OPTICS; MIRRORS;

DEFORMABLE MIRROR; MICROMACHINED ADAPTIVE MIRROR;

EID: 0032265949     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321669     Document Type: Conference Paper

References (4)

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