Microwave plasma torch abatement of NF3 and SF6

Physics of Plasmas

Volumn 13, Issue 3, 2006, Pages

  Hong, Yong Cheol ^a   Uhm, Han Sup ^a   Chun, Byung Jun ^b   Lee, Sun Ku ^c   Hwang, Sang Kyu ^c   Kim, Dong Su ^c  

^a Ajou University   (South Korea)

^b Kyonggido Small Business Center   (South Korea)

^c MAT Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; FLUORINE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROWAVES; PLASMA TORCHES;

MICROWAVE PLASMA ABATEMENT; MICROWAVE POWER; PLASMA TORCH ABATEMENT;

DUST ABATEMENT;

EID: 33645683773     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2182240     Document Type: Article

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