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Volumn 20, Issue 3, 2003, Pages 476-481
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CF4 decomposition by thermal plasma processing
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Author keywords
CF4; Decomposition; Thermal Plasma
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Indexed keywords
DECOMPOSITION;
MOLECULAR WEIGHT;
THERMODYNAMICS;
THERMAL PLASMAS;
CARBON INORGANIC COMPOUNDS;
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EID: 0042744708
PISSN: 02561115
EISSN: None
Source Type: Journal
DOI: 10.1007/BF02705551 Document Type: Article |
Times cited : (37)
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References (7)
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