Studies of 2.45 GHz microwave induced plasma abatement of CF4

Environmental Science and Technology

Volumn 37, Issue 17, 2003, Pages 3985-3988

  Radoiu, Marilena T ^a  

^a BOC Edwards   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

GAS MIXTURES;

GAS DYNAMICS; MIXTURES; PLASMAS;

MICROWAVE DEVICES;

CARBON; CARBON TETRAFLUORIDE; FLUOROCARBON; NITROGEN; UNCLASSIFIED DRUG;

PLASMA;

ARTICLE; ATMOSPHERIC PRESSURE; ELECTRIC FIELD; GAS; GAS ANALYSIS; GAS FLOW; MICROWAVE RADIATION; OSCILLATION; POLLUTION CONTROL;

AIR MOVEMENTS; AIR POLLUTION; FLUOROCARBONS; MICROWAVES;

EID: 0042285953     PISSN: 0013936X     EISSN: None     Source Type: Journal    
DOI: 10.1021/es0263846     Document Type: Article

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