Combination of glow-discharge and arc plasmas for CF4 abatement

Research on Chemical Intermediates

Volumn 27, Issue 9, 2001, Pages 957-974

  Huang, Aimin ^a   Xia, Guanguang ^a   Spiess, Franz Josef ^a   Chen, Xiao ^a   Rozak, Jeffery ^a   Suib, Steven L ^a   Takahashi, Tomonori ^b   Hayashi, Yuji ^c   Matsumoto, Hiroshige ^d  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b NGK INSULATORS LTD   (Japan)

^c Sumitomo Electric Industries   (Japan)

^d NAGASAKI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON TETRAFLUORIDE; TUBULAR QUARTZ REACTOR;

DECOMPOSITION; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HYDROGEN; MASS SPECTROMETRY; METHANE; OXYGEN; PLASMA TORCHES; REACTION KINETICS; WATER;

CARBON INORGANIC COMPOUNDS;

EID: 0035732858     PISSN: 09226168     EISSN: None     Source Type: Journal    
DOI: 10.1163/156856701753536697     Document Type: Article

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