The latest advances in high-dielectric thin-film capacitor technology for GHz-RF devices

Integrated Ferroelectrics

Volumn 76, Issue , 2005, Pages 47-57

  Suzuki, Toshimasa ^a   Morito, Kentaro ^a   Iwazaki, Yoshiki ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

(Ba,Sr)TiO3; Capacitor; Dielectric loss; Piezoelectric resonance; SrTiO3; Stress

Indexed keywords

CAPACITORS; DIELECTRIC DEVICES; FINITE ELEMENT METHOD; PERMITTIVITY; RESONANCE; SPUTTER DEPOSITION; THERMAL STRESS;

ELECTROMAGNETIC SIMULATION; ELECTROMECHANICAL RESONANCE; PIEZOELECTRIC RESONANCE; SPUTTERING DEPOSITION PRESSURE;

THIN FILMS;

EID: 33645503542     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1016/j.neures.2005.01.006     Document Type: Conference Paper

References (23)

1. M. Madihian, IEEE MTT-S Int. Microwave Symp. Dig. vol. 1, pp. 257, (2001).
2. R. Mukhopadhyay, Y. Park, P. Sen, N. Srirattana, J. Lee, C.-H. Lee, S. Nuttinck, A. Joseph, J. D. Cressler, and J. Laskar, IEEE Trans. Microwave Theory Tech. 53, 81 (2005).
3. H. Kishi, Y. Mizuno, and H. Chazono, Jpn. J. Appl. Phys. 42, 1 (2003).
4. K. Ikeda, K. Kobayashi, K. Ohta, R. Kondo, T. Suzuki, and M. Fujimoto, IEEE Trans. Magnetics 39(5), 3057 (2003).
5. K. Ota, F. Iiauka, M. Satomi, M. Yasuda, K. Nakajima, T. Ogino, and M. Fujimoto, J. Ceram. Soc. Japan 110(5), 436 (2002).
6. K. Morito, H. Wakabayashi, T. Suzuki, and M. Fujimoto, J. Ceram. Soc. Japan 110(5), 408 (2002).
7. K. Ikeda, K. Kobayashi, and M. Fujimoto, J. Appl. Phys. 92(9), 5395 (2002).
8. B. Acikel, Y. Liu, A. C. Nagra, Y. Liu, P. Periaswamy, T. R. Taylor, J. S. Speck, and R. A. York, IEEE Microwave and Guided Wave Letters 10, 10 (2000).
9. S. Georgian, A. Vorobiev, D. Kuylenstierna, A. Deleniv, S. Abadei, A. Eriksson, and P. Rundqvist, Integrated Ferroelectrics 66, 125 (2004).
10. K. Morito and T. Suzuki, J. Appl. Phys. (in press).
11. A. F. Devonshire, Adv. Phys. 3, 85 (1954).
12. N. A. Pertsev, A. G. Zembilgotov, and A. K. Taantsev, Phys. Rev. Lett. 80, 1988 (1998).
13. W. Y. Park, K. H. Ahn, and C. S. Hwang, Appl. Phys. Lett. 83, 4387 (2003).
14. T. Suzuki, Y. Nishi, and M. Fujimoto, Philosophical Magazine A 79(10), 2461 (1999).
15. Kenji Ikuta, Yohtaro Umeda, and Yasunobu Ishii, Jpn. J. Appl. Phys. 37, 210-214 (1998).
16. Z. Ma, A. J. Becker, P. Polakos, H. Huggins, J. Pastalan, H. Wu, K. Watts, Y. H. Wong, and P. Mankiewich, IEEE Trans. Electr. Dev. 45, 1811-1816 (1998).
17. T. Hamano, D. J. Towner, and B. W. Wessels, Appl. Phys. Lett. 83, 5274-5276 (2003).
18. Y. Iwazaki, K. Ohta, and T. Suzuki, J. European Ceram. Soc. (in press).
19. O. G. Vendik, E. K. Hollman, A. B. Kozirev, and A. M. Prudan, J. Super-conductivity 12(2), 325 (1999).
20. A. K. Tagantsev, V. O. Sherman, K. F. Astafiev, J. Venkatesh, and N. Setter, J. Electroceram. 11, 5 (2003).
21. T. Suzuki, Y. Nishi, and M. Fujimoto, J. Amer. Ceram. Soc. 83(12), 3185 (2000).
22. T. Suzuki, Y. Nishi, and M. Fujimoto, Philosophical Magazine A 80(3), 621 (2000).
23. K. Morito, Y. Iwazaki, T. Suzuki, and M. Fujimoto, J. Appl. Phys. 94(8), 5199 (2003).